| ASYS 0000720500 | |||
|---|---|---|---|
| Filing Date | Form Type | Description | Document |
| 2007-02-23 | 8-K | FORM 8-K | View Document |
| 2007-02-22 | 4/A | MAIN DOCUMENT DESCRIPTION | View Document |
| 2007-02-21 | 4 | PRIMARY DOCUMENT | View Document |
| 2007-02-21 | 4 | MAIN DOCUMENT DESCRIPTION | View Document |
| 2007-02-21 | 3 | MAIN DOCUMENT DESCRIPTION | View Document |
| 2007-02-16 | SC 13D/A | AMTECH SYSTEMS, INC. | View Document |
| 2007-02-14 | 10-Q | FORM 10-Q | View Document |
| 2007-02-14 | SC 13G | SEC FILING | View Document |
| 2007-02-14 | SC 13G | SEC FILING | View Document |
| 2007-02-12 | 4 | FORM 4 SUBMISSION | View Document |
| 2007-02-12 | SC 13D/A | View Document | |
| 2007-02-09 | SC 13G | View Document | |
| 2007-02-06 | 3 | PRIMARY DOCUMENT | View Document |
| 2007-02-01 | 424B1 | PROSPECTUSES FILED PURSUANT TO RULE 424(B)(1) | View Document |
| 2007-02-01 | S-1MEF | FORM S-1MEF | View Document |
| 2007-01-31 | EFFECT | View Document | |
| 2007-01-30 | S-1/A | PRE-EFFECTIVE AMENDMENT | View Document |
| 2007-01-29 | 10-K/A | FORM 10-K/A | View Document |
| 2007-01-16 | S-1/A | PRE-EFFECTIVE AMENDMENT | View Document |
| 2006-12-27 | SC 13D/A | View Document | |
| 2006-12-22 | S-1 | FORM S-1 | View Document |
| 2006-12-21 | 10-K | FORM 10-K | View Document |
| 2006-12-14 | 8-K | FORM 8-K | View Document |
| 2006-12-13 | 4/A | PRIMARY DOCUMENT | View Document |
| 2006-12-12 | 4 | View Document | |
| 2006-12-12 | 4 | View Document | |
| 2006-11-27 | SC 13D/A | AMTECH SYSTEMS, INC. - FORM SC 13D/A RICHARD L. SCOTT | View Document |
| 2006-11-27 | 3 | FORM 3 SUBMISSION | View Document |
| 2006-11-06 | SC 13G/A | AMTECHSYSTEMSINC13GAMD1 | View Document |
| 2006-08-14 | 10-Q | FORM 10-Q | View Document |
| 2006-06-27 | SC 13D/A | AMTECH SYSTEMS, INC./RICHARD L. SCOTT | View Document |
| 2006-06-05 | SC 13G | AMTECHSYSTEMSINC13G | View Document |
| 2006-05-16 | SC 13D/A | View Document | |
| 2006-05-16 | SC 13D/A | View Document | |
| 2006-05-15 | SC 13D/A | AMTECH SYSTEMS, INC. - FORM SC 13D/A | View Document |
| 2006-05-15 | 10-Q | FORM 10-Q | View Document |
| 2006-05-03 | 4 | PRIMARY DOCUMENT | View Document |
| 2006-05-03 | 3 | PRIMARY DOCUMENT | View Document |
| 2006-04-28 | 8-K | FORM 8-K | View Document |
| 2006-04-12 | 8-K | FORM 8-K | View Document |
| 2006-03-23 | 8-K | FORM 8-K | View Document |
| 2006-03-03 | 4 | PRIMARY DOCUMENT | View Document |
| 2006-03-03 | 4 | PRIMARY DOCUMENT | View Document |
| 2006-03-03 | 4 | PRIMARY DOCUMENT | View Document |
| 2006-02-22 | 4 | PRIMARY DOCUMENT | View Document |
| 2006-02-21 | 4 | View Document | |
| 2006-02-21 | 4 | View Document | |
| 2006-02-15 | 4 | PRIMARY DOCUMENT | View Document |
| 2006-02-14 | 10-Q | FORM 10-Q | View Document |
| 2006-02-13 | DEF 14A | View Document | |
| 2006-02-10 | ARS | AUTO-GENERATED PAPER DOCUMENT | View Document |
| 2006-02-03 | 424B3 | FORM 424B3 | View Document |
| 2006-01-30 | 4/A | View Document | |
| 2006-01-30 | 3/A | View Document | |
| 2006-01-30 | 10-K/A | View Document | |
| 2006-01-17 | S-8 | FORM S-8 | View Document |
| 2006-01-13 | S-3 | FORM S-3 | View Document |
| 2006-01-13 | S-8 POS | FORM S-8/A | View Document |
| 2005-12-29 | 10-K | FORM 10-K | View Document |
| 2005-11-16 | 4 | PRIMARY DOCUMENT | View Document |
| 2005-11-16 | 4 | PRIMARY DOCUMENT | View Document |
| 2005-11-16 | 4 | PRIMARY DOCUMENT | View Document |
| 2005-11-14 | 3 | FORM 3 | View Document |
| 2005-11-07 | 3 | PRIMARY DOCUMENT | View Document |
| 2005-11-02 | 8-K | FORM 8-K | View Document |
| 2005-11-01 | UPLOAD | View Document | |
| 2005-11-01 | UPLOAD | View Document | |
| 2005-10-18 | 10-Q/A | FORM 10-Q AMENDMENT NO 1 | View Document |
| 2005-10-18 | 10-K/A | FORM 10-K AMENDMENT NO. 2 | View Document |
| 2005-10-12 | CORRESP | View Document | |
| 2005-08-15 | 10-Q | FORM 10-Q | View Document |
| 2005-07-22 | CORRESP | View Document | |
| 2005-06-15 | DEF 14A | DEFINITIVE PROXY STATEMENT | View Document |
| 2005-06-14 | ARS | AUTO-GENERATED PAPER DOCUMENT | View Document |
| 2005-06-01 | SC 13D | View Document | |
| 2005-05-24 | 8-K | FORM 8-K | View Document |
| 2005-05-16 | 10-Q | FORM 10-Q | View Document |
| 2005-05-09 | REGDEX | AUTO-GENERATED PAPER DOCUMENT | View Document |
| 2005-05-09 | SC 13D | View Document | |
| 2005-05-02 | SC 13D | AMTECH SYSTEMS, INC. | View Document |
| 2005-04-28 | 8-K | FORM 8K | View Document |
| 2005-02-15 | NT 10-Q | NT 10-Q | View Document |
| 2005-02-15 | 10-Q | 10-Q | View Document |
| 2005-01-28 | 10-K/A | 10-K/A | View Document |
| 2005-01-13 | 10-K | 10-K | View Document |
| 2005-01-03 | NT 10-K/A | NT 10-K/A | View Document |
| 2004-12-30 | NT 10-K | NT 10-K | View Document |
| 2004-09-29 | 8-K/A | AMENDMENT NO. 1 TO FORM 8-K | View Document |
| 2004-08-11 | 10-Q | FORM 10-Q | View Document |
| 2004-07-15 | 8-K | FORM 8-K | View Document |
| 2004-07-07 | 8-K | FORM 8-K | View Document |
| 2004-05-14 | 10-Q | FORM 10-Q | View Document |
| 2004-05-05 | 4 | PRIMARY DOCUMENT | View Document |
| 2004-05-05 | 4 | PRIMARY DOCUMENT | View Document |
| 2004-05-05 | 8-K | FORM 8-K | View Document |
| 2004-04-28 | 4 | PRIMARY DOCUMENT | View Document |
| 2004-02-17 | ARS | AUTO-GENERATED PAPER DOCUMENT | View Document |
| 2004-02-17 | 10-Q | FORM 10-Q | View Document |
| 2004-01-28 | DEF 14A | DEFINITIVE NOTICE AND PROXY STATEMENT | View Document |
| 2003-12-23 | 10-K | FORM 10-K | View Document |
