| 2003-08-20 |
10-Q |
10-Q |
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| 2003-08-15 |
NT 10-Q |
NT 10-Q |
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| 2003-05-15 |
10-Q |
QUARTERLY REPORT FOR THE QTR ENDED 3/31/2003 |
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| 2003-02-14 |
10-Q |
QUARTERLY REPORT FOR QTR ENDING 12-31-02 |
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| 2003-02-11 |
S-8 |
REGISTRATION STATEMENT OF AMTECH SYSTEMS, INC. |
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| 2003-02-11 |
10-K/A |
AMENDMENT NO. 1 TO FORM 10-K |
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| 2003-01-28 |
ARS |
AUTO-GENERATED PAPER DOCUMENT |
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| 2003-01-27 |
DEF 14A |
DEFINITIVE N&PS |
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| 2002-12-31 |
10-K |
ANNUAL REPORT FOR THE FISCAL YR ENDED 09/30/2002 |
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| 2002-12-31 |
NT 10-K |
NOTIFICATION OF LATE FILING |
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| 2002-08-08 |
10-Q |
QUARTERLY REPORT FOR QTR ENDING 6-30-02 |
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| 2002-07-11 |
8-K |
CURRENT REPORT DTD. 07/11/2002 |
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| 2002-05-10 |
10-Q |
QUARTERLY REPORT FOR QTR. ENDED 03/31/2002 |
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| 2002-02-15 |
10-K405/A |
AMENDMENT NO. 1 TO 10-K405 |
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| 2002-02-14 |
10-Q |
QUARTERLY REPORT FOR THE QTR ENDED 12/31/01 |
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| 2002-01-28 |
DEF 14A |
DEFINITIVE N&PS OF AMTECH SYSTEMS |
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| 2002-01-15 |
S-8 |
FORM S-8 OF AMTECH SYSTEMS |
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| 2002-01-14 |
10-K405 |
ANNUAL REPORT FOR YEAR ENDING 09-30-2001 |
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| 2002-01-02 |
NT 10-K |
NT 10-K |
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| 2001-08-14 |
10-Q |
QUARTERLY REPORT FOR QTR ENDING 6-30-01 |
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| 2001-05-15 |
10-Q |
QUARTERLY REPORT FOR QTR. ENDED 03/31/2001 |
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| 2001-02-20 |
DEF 14A |
DEF 14A |
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| 2001-02-14 |
10-Q |
QUARTERLY REPORT FOR THE QTR ENDED 12/31/2000 |
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| 2001-02-13 |
SC 13G |
|
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| 2001-01-30 |
10-K/A |
AMENDMENT NO. 1 TO FORM 10-K |
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| 2000-12-22 |
10-K405 |
AMTECH SYSTEMS, INC. |
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| 2000-10-31 |
424B3 |
FINAL PROSPECTUS OF AMTECH SYSTEMS, INC. |
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| 2000-10-02 |
S-3 |
FORM S-3 OF AMTECH SYSTEMS, INC. |
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| 2000-09-22 |
8-K |
CURRENT REPORT DATED 09/08/2000 |
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| 2000-09-19 |
S-8 |
FORM S-8 OF AMTECH SYSTEMS, INC. |
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| 2000-08-14 |
10-Q |
QUARTERLY REPORT FOR THE QTR ENDED 6/30/00 |
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| 2000-06-08 |
4 |
FORM 4 OF ALVIN L. KATZ |
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| 2000-05-15 |
10-Q |
FORM 10-Q |
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| 2000-03-03 |
10-K/A |
AMENDMENT NO. 1 TO FORM 10-K |
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| 2000-02-15 |
10-Q |
QUARTERLY REPORT FOR THE QTR. ENDED 12/31/99 |
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| 2000-02-15 |
NT 10-Q |
NOTIFICATION OF LATE FILING |
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| 2000-02-10 |
DEF 14A |
DEFINITIVE N&PS OF AMTECH SYSTEMS, INC. |
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| 1999-12-23 |
10-K405 |
ANNUAL REPORT FOR THE YEAR ENDED 9/30/99 |
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| 1999-08-16 |
10-Q |
QTRLY REPORT FOR THE PERIOD ENDED 06/30/99 |
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| 1999-06-08 |
8-A12G |
FORM 8-A FOR AMTECH SYSTEMS, INC. |
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| 1999-06-01 |
8-K |
CURRENT REPORT DATED 5/17/99 |
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| 1999-05-17 |
10-Q |
QUARTERLY REPORT |
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| 1999-02-16 |
10-Q |
QUARTERLY REPORT FOR THE QTR ENDED 12/31/98 |
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| 1999-01-28 |
DEF 14A |
DEFINITIVE N&PS OF AMTECH SYSTEMS, INC. |
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| 1999-01-15 |
PRE 14A |
PRRELIMINARY N&PS OF AMTECH SYSTEMS, INC. |
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| 1998-12-24 |
10-K405 |
FORM 10-K OF AMTECH SYSTEMS, INC. FTYE 9/30/98 |
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| 1998-08-14 |
10-Q |
QUARTERLY REPORT F.T.Q.E. 6/30/98 |
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| 1998-05-14 |
10-Q |
QUARTERLY REPORT FOR 2ND QTR |
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| 1998-02-19 |
10-Q/A |
QUARTERLY REPORT - AMENDMENT |
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| 1998-02-17 |
10-Q |
QUARTERLY REPORT |
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| 1998-02-04 |
10-K/A |
FORM 10-K AMENDMENT |
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| 1998-01-29 |
DEF 14A |
NOTICE & PROXY |
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| 1998-01-12 |
PRE 14A |
NOTICE & PROXY |
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| 1997-12-29 |
10-K405 |
ANNUAL REPORT |
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| 1997-11-14 |
5 |
FORM 5 |
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| 1997-09-12 |
SC 13G |
SCHEDULE 13G |
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| 1997-09-09 |
8-K/A |
AMENDMENT TO 8-K |
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| 1997-08-19 |
10-Q |
QUARTERLY REPORT |
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| 1997-08-14 |
NT 10-Q |
NOTIFICATION OF LATE FILING |
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| 1997-07-09 |
8-K |
FORM 8-K |
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| 1997-05-15 |
10-Q |
FORM 10-Q |
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| 1997-02-14 |
10-Q |
FORM 10-Q |
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| 1997-01-30 |
DEF 14A |
NOTICE OF SPECIAL MEETING |
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| 1996-12-30 |
10-K405 |
ANNUAL REPORT |
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| 1996-08-14 |
10-Q |
FORM 10Q |
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| 1996-08-14 |
S-3 |
FORM S-3 |
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| 1996-08-09 |
S-3 |
FORM S-3 |
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| 1996-08-09 |
S-8 |
NON-EMPLOYEE DIRECTORS STOCK OPTION PLAN |
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| 1996-08-09 |
S-8 |
1995 STOCK OPTION AND STOCK BONUS PLANS |
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| 1996-05-21 |
10-Q |
FORM 10-Q |
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| 1996-05-15 |
NT 10-Q |
FORM NT 10-Q |
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| 1996-02-14 |
10-Q |
FORM 10-Q |
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| 1996-02-09 |
8-K |
FORM 8-K |
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| 1996-01-29 |
DEF 14A |
PROXY STATEMENT |
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| 1996-01-16 |
10-K |
FORM 10-K |
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| 1995-12-29 |
NT 10-K |
FORM 12B-25 |
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| 1995-08-14 |
10-Q |
FORM 10-Q |
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| 1995-05-15 |
10-Q |
FORM 10-Q |
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