FILINGS
| ACLS 0001113232 | |||
|---|---|---|---|
| Filing Date | Form Type | Description | Document |
| 2022-03-17 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-03 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-02 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-02 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-02 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-02 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-02 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-03-02 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-02-28 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-02-25 | 10-K | 10-K | View Document |
| 2022-02-24 | 8-K | FORM 8-K | View Document |
| 2022-02-23 | 3 | FORM 3 SUBMISSION | View Document |
| 2022-02-23 | 3 | FORM 3 SUBMISSION | View Document |
| 2022-02-10 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-02-10 | SC 13G/A | PRIMECAP MANAGEMENT CO/CA/ | View Document |
| 2022-02-09 | SC 13G/A | AXCELIS TECHNOLOGIES, INC. | View Document |
| 2022-02-09 | SC 13G/A | SCHEDULE 13G/A | View Document |
| 2022-02-08 | SC 13G/A | SEC SCHEDULE 13G | View Document |
| 2022-02-07 | 8-K | FORM 8-K | View Document |
| 2022-01-28 | SC 13G/A | View Document | |
| 2021-12-09 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-11-22 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-11-12 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-11-08 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-11-08 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-11-05 | 10-Q | 10-Q | View Document |
| 2021-11-03 | 8-K | FORM 8-K | View Document |
| 2021-09-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-08-31 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-08-30 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-08-30 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-08-27 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-08-27 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-08-27 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-08-25 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-08-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-08-09 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-08-06 | 10-Q | 10-Q | View Document |
| 2021-08-04 | 8-K | FORM 8-K | View Document |
| 2021-05-24 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-05-21 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-05-18 | SD | SD | View Document |
| 2021-05-17 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-05-17 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-05-17 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-05-17 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-05-17 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-05-17 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-05-17 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-05-13 | 8-K | FORM 8-K | View Document |
| 2021-05-06 | 10-Q | 10-Q | View Document |
| 2021-05-04 | 8-K | FORM 8-K | View Document |
| 2021-03-25 | DEF 14A | DEF 14A | View Document |
| 2021-03-12 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-03-12 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-03-03 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-03-02 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-03-02 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-03-02 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-03-02 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-03-02 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-02-26 | 10-K | 10-K | View Document |
| 2021-02-25 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-02-19 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-02-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-02-17 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-02-17 | 4 | FORM 4 SUBMISSION | View Document |
| 2021-02-12 | SC 13G/A | AXCELIS TECHNOLOGIES, INC. | View Document |
| 2021-02-12 | SC 13G/A | SEC SCHEDULE 13G | View Document |
| 2021-02-12 | SC 13G/A | SC 13G/A | View Document |
| 2021-02-10 | 8-K | FORM 8-K | View Document |
| 2021-02-10 | SC 13G/A | SCHEDULE 13G/A | View Document |
| 2021-02-04 | SC 13G/A | SEC SCHEDULE 13G | View Document |
| 2021-01-26 | SC 13G/A | View Document | |
| 2020-12-01 | 4 | FORM 4 SUBMISSION | View Document |
| 2020-11-24 | 4 | FORM 4 SUBMISSION | View Document |
| 2020-11-18 | 4/A | FORM 4/A SUBMISSION | View Document |
| 2020-11-17 | 4 | FORM 4 SUBMISSION | View Document |
| 2020-11-17 | 4 | FORM 4 SUBMISSION | View Document |
| 2020-11-06 | 10-Q | 10-Q | View Document |
| 2020-11-05 | 8-K | FORM 8-K | View Document |
| 2020-08-05 | 10-Q | 10-Q | View Document |
| 2020-08-04 | 8-K | FORM 8-K | View Document |
| 2020-05-29 | 4 | FORM 4 SUBMISSION | View Document |
| 2020-05-29 | S-3ASR | S-3ASR | View Document |
| 2020-05-29 | S-8 | S-8 | View Document |
| 2020-05-28 | 4 | FORM 4 SUBMISSION | View Document |
| 2020-05-28 | 4/A | FORM 4/A SUBMISSION | View Document |
| 2020-05-26 | 4 | FORM 4 SUBMISSION | View Document |
| 2020-05-26 | 4 | FORM 4 SUBMISSION | View Document |
| 2020-05-22 | 4 | FORM 4 SUBMISSION | View Document |
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