FILINGS
| ACLS 0001113232 | |||
|---|---|---|---|
| Filing Date | Form Type | Description | Document |
| 2023-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-16 | 144 | View Document | |
| 2023-05-16 | 144 | View Document | |
| 2023-05-16 | 144 | View Document | |
| 2023-05-16 | 144 | View Document | |
| 2023-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-12 | 8-K | FORM 8-K | View Document |
| 2023-05-11 | 144 | View Document | |
| 2023-05-11 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-11 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-11 | 144 | View Document | |
| 2023-05-10 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-10 | 144 | View Document | |
| 2023-05-09 | 144 | View Document | |
| 2023-05-09 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-09 | 144 | View Document | |
| 2023-05-05 | 10-Q | 10-Q | View Document |
| 2023-05-03 | 8-K | FORM 8-K | View Document |
| 2023-04-18 | 8-K | FORM 8-K | View Document |
| 2023-04-10 | SC 13G/A | SCHEDULE 13G/A | View Document |
| 2023-03-31 | ARS | ARS | View Document |
| 2023-03-31 | DEF 14A | FORM DEF 14A | View Document |
| 2023-03-01 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-03-01 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-03-01 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-03-01 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-03-01 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-02-24 | 10-K | 10-K | View Document |
| 2023-02-14 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-02-13 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-02-13 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-02-13 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-02-13 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-02-13 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-02-13 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-02-13 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-02-10 | SC 13G/A | AXCELIS TECHNOLOGIES, INC. | View Document |
| 2023-02-09 | SC 13G/A | SCHEDULE 13G/A | View Document |
| 2023-02-08 | 8-K | FORM 8-K | View Document |
| 2023-01-26 | SC 13G/A | View Document | |
| 2023-01-20 | SC 13G/A | View Document | |
| 2022-12-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-12-14 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-12-09 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-12-08 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-12-05 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-30 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-28 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-28 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-23 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-21 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-14 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-10 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-11-03 | 10-Q | 10-Q | View Document |
| 2022-11-02 | 8-K | FORM 8-K | View Document |
| 2022-10-27 | SC 13G | AXCELIS TECHNOLOGIES, INC. | View Document |
| 2022-10-07 | SC 13G/A | PRIMECAP MANAGEMENT CO/CA/ | View Document |
| 2022-09-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-09-06 | 3 | FORM 3 SUBMISSION | View Document |
| 2022-08-25 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-08-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-08-12 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-08-12 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-08-12 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-08-12 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-08-08 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-08-04 | 10-Q | 10-Q | View Document |
| 2022-08-03 | 8-K | FORM 8-K | View Document |
| 2022-05-20 | SD | SD | View Document |
| 2022-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2022-05-11 | 8-K | FORM 8-K | View Document |
| 2022-05-05 | 10-Q | 10-Q | View Document |
| 2022-05-04 | 8-K | FORM 8-K | View Document |
| 2022-03-30 | DEF 14A | DEF 14A | View Document |
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