FILINGS
| ACLS 0001113232 | |||
|---|---|---|---|
| Filing Date | Form Type | Description | Document |
| 2024-03-15 | 4 | View Document | |
| 2024-03-11 | 4 | View Document | |
| 2024-03-08 | PRE 14A | PRE 14A | View Document |
| 2024-03-07 | 144 | View Document | |
| 2024-03-01 | 144 | View Document | |
| 2024-03-01 | 4 | View Document | |
| 2024-03-01 | 4 | View Document | |
| 2024-03-01 | 4 | View Document | |
| 2024-03-01 | 4 | View Document | |
| 2024-03-01 | 4 | View Document | |
| 2024-02-29 | 8-K | FORM 8-K | View Document |
| 2024-02-29 | 4 | View Document | |
| 2024-02-28 | 3 | View Document | |
| 2024-02-28 | 3 | View Document | |
| 2024-02-28 | 10-K/A | 10-K/A | View Document |
| 2024-02-26 | 4 | View Document | |
| 2024-02-23 | 10-K | 10-K | View Document |
| 2024-02-23 | 144 | View Document | |
| 2024-02-13 | SC 13G/A | SCHEDULE 13G/A | View Document |
| 2024-02-09 | SC 13G/A | AXCELIS TECHNOLOGIES, INC. | View Document |
| 2024-02-07 | 8-K | View Document | |
| 2024-01-19 | SC 13G/A | View Document | |
| 2024-01-02 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-12-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-12-14 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-11-13 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-11-06 | 144 | View Document | |
| 2023-11-02 | 10-Q | 10-Q | View Document |
| 2023-11-01 | 8-K | FORM 8-K | View Document |
| 2023-10-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-09-29 | 3 | FORM 3 SUBMISSION | View Document |
| 2023-09-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-09-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-09-14 | 144 | View Document | |
| 2023-09-14 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-09-08 | 4/A | FORM 4/A SUBMISSION | View Document |
| 2023-09-07 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-09-07 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-09-07 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-09-07 | 144 | View Document | |
| 2023-09-07 | 144 | View Document | |
| 2023-09-07 | 144 | View Document | |
| 2023-09-05 | 8-K | FORM 8-K | View Document |
| 2023-09-01 | 3 | FORM 3 SUBMISSION | View Document |
| 2023-08-07 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-08-07 | 144 | View Document | |
| 2023-08-07 | 144 | View Document | |
| 2023-08-03 | S-3ASR | S-3ASR | View Document |
| 2023-08-03 | 10-Q | 10-Q | View Document |
| 2023-08-02 | 8-K | FORM 8-K | View Document |
| 2023-06-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-06-15 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-06-14 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-06-12 | 3 | FORM 3 SUBMISSION | View Document |
| 2023-06-12 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-06-12 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-06-12 | 144 | View Document | |
| 2023-06-12 | 144 | View Document | |
| 2023-06-12 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-06-09 | 144 | View Document | |
| 2023-06-08 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-06-08 | 144 | View Document | |
| 2023-06-07 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-06-07 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-06-07 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-06-07 | 144 | View Document | |
| 2023-06-07 | 144 | View Document | |
| 2023-06-06 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-06-06 | 4/A | FORM 4/A SUBMISSION | View Document |
| 2023-05-30 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-26 | 144 | View Document | |
| 2023-05-25 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-25 | 144 | View Document | |
| 2023-05-25 | 144 | View Document | |
| 2023-05-25 | 144 | View Document | |
| 2023-05-25 | 144 | View Document | |
| 2023-05-25 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-25 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-25 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-25 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-22 | 144 | View Document | |
| 2023-05-19 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-19 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-19 | 144 | View Document | |
| 2023-05-18 | 144 | View Document | |
| 2023-05-18 | 144 | View Document | |
| 2023-05-18 | 144 | View Document | |
| 2023-05-18 | 144 | View Document | |
| 2023-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-18 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-18 | SD | FORM SD | View Document |
| 2023-05-17 | 144 | View Document | |
| 2023-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-16 | 4 | FORM 4 SUBMISSION | View Document |
| 2023-05-16 | 4 | FORM 4 SUBMISSION | View Document |
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